空气核心 ARROW 波导在覆盖膜的沟中制造的波导
Seth Walker1, Holger Schmidt2, Aaron R Hawkins1
1Electrical and Computer Engineering Department, Brigham Young University, 450 Engineering Building, Provo, UT 84602, USA.
概括
研究人员在晶片上设计和制造了空心反共振反射光学波导 (ARROW). 这些波导中的光学损失随着反射层的增加而减少,从而实现低损失系数.
科学领域:
- 光学和光子学 在光学和光子学.
- 材料科学 材料科学 材料科学
- 纳米技术纳米技术
背景情况:
- 空心光学波导提供了低损光传输的潜力.
- 在基板上制造具有高性能的波导具有挑战.
研究的目的:
- 在上设计,制造和表征新的空心反共振反射光学波导 (ARROWs).
- 为了研究反射层数量对光学损失的影响.
主要方法:
- 使用标准的微型制造技术,包括在片上进行等离子蚀刻.
- 在覆盖膜的沟内,有不同数量的薄膜反射层制造的ARROW.
- 制造波导的光学损失系数的特征.
主要成果:
- 成功制造了四种不同的空心ARROW设计.
- 显示出明显的光学损失下降趋势,反射层数量增加.
- 实现了低至1cm-1的测量光损失系数.
结论:
- 空心ARROW可以使用已建立的微型制造工艺在上制造.
- 薄膜反射层的数量是最小化光学损失的关键参数.
- 证明的低损失系数对集成光学应用具有前景.
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