介面键诱导原子移除机制的异质性的

Diankai Zhang1, Jie Qin2, Yang Wang1,3,2

  • 1School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu 610031, P. R. China.

概括

在晶片的化学机械抛光 (CMP) 过程中,去除不均的表面是制造业的一个挑战. 这项研究揭示了原子尺度的异型去除机制,确定了表面密度和水友性作为改善半导体制造的关键因素.

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