概括
本研究介绍了ResGNN-OPC,这是一种基于学习的新型方法,用于光学近距离校正 (OPC). 它大大加速了OPC计算,同时提高了准确性,使先进的光刻更高效.
科学领域:
- 半导体制造业 半导体制造业
- 计算式 lithography 的使用方法.
背景情况:
- 光学近距离校正 (OPC) 对于补偿光学光刻画中的图像扭曲至关重要.
- 现代基于模型的OPC (MBOPC) 面临着随着光刻技术节点的发展而面临的重大时间挑战.
研究的目的:
- 开发一种以学习为基础的OPC方法,显著更快,更准确.
- 为了解决传统MBOPC的计算瓶.
主要方法:
- 为OPC开发了一个残余图神经网络 (ResGNN-OPC).
- 该网络将残余结构集成到图形卷积层中,以模拟MBOPC代.
- 这种设计增强了网络深度,可解释性和适配能力.
主要成果:
- 与传统的MBOPC相比,ResGNN-OPC实现了超过6000倍的加速.
- 与现有的基于学习的方法相比,OPC校正的预测准确度提高了40%以上.
- 可以比较的运行时间和与MBOPC相似的图像保真性得到维护,代次数更少.
结论:
- ResGNN-OPC为光学近距离校正提供了一个高效和准确的解决方案.
- 该方法加快了光刻过程,并保持了高图像保真度.
- 这种方法对下一代半导体制造有希望.
相关概念视频
Residuals and Least-Squares Property
7.8K
The vertical distance between the actual value of y and the estimated value of y. In other words, it measures the vertical distance between the actual data point and the predicted point on the line
If the observed data point lies above the line, the residual is positive, and the line underestimates the actual data value for y. If the observed data point lies below the line, the residual is negative, and the line overestimates the actual data value for y.
The process of fitting the best-fit...
If the observed data point lies above the line, the residual is positive, and the line underestimates the actual data value for y. If the observed data point lies below the line, the residual is negative, and the line overestimates the actual data value for y.
The process of fitting the best-fit...
7.8K
Distance Corrections
81
To achieve precise distance measurements, especially in surveying and construction, certain corrections must be applied to account for potential sources of error like the standardization errors, temperature variations, and slope adjustments.Standardization error emerges when measurement equipment undergoes changes, such as wear, repairs, or weather impacts. To address this, surveyors compare the equipment’s readings to a standard. This process identifies any deviation that might lead to...
81
Reducing Line Loss
193
In a three-phase circuit, line loss is an indicator of energy dissipated as heat due to the resistance of transmission lines. To address this, incorporating transformers into the system—a step-up transformer at the source and a step-down transformer at the load—is a strategic solution. Two three-phase transformers are introduced to improve this.
With a step-up transformer at the source, the voltage is increased, thereby reducing the current in the transmission lines since power loss...
With a step-up transformer at the source, the voltage is increased, thereby reducing the current in the transmission lines since power loss...
193
Residual Plots
5.0K
A residual plot is a statistical representation of data used to analyze correlation and regression results. It helps verify the requirements for drawing specific conclusions about correlation and regression. To obtain the residual plot, first, the residual for each data value is calculated, which is simply the vertical distance between the observed and the predicted value obtained from the regression equation.
When the residual values are plotted against the variable x, it is called a residual...
When the residual values are plotted against the variable x, it is called a residual...
5.0K
Linear Approximation in Frequency Domain
131
Linear systems are characterized by two main properties: superposition and homogeneity. Superposition allows the response to multiple inputs to be the sum of the responses to each individual input. Homogeneity ensures that scaling an input by a scalar results in the response being scaled by the same scalar.
In contrast, nonlinear systems do not inherently possess these properties. However, for small deviations around an operating point, a nonlinear system can often be approximated as linear....
In contrast, nonlinear systems do not inherently possess these properties. However, for small deviations around an operating point, a nonlinear system can often be approximated as linear....
131
Vector Algebra: Graphical Method
13.6K
Vectors can be multiplied by scalars, added to other vectors, or subtracted from other vectors. The vector sum of two (or more) vectors is called the resultant vector or, for short, the resultant.
We use the laws of geometry to construct resultant vectors, followed by trigonometry to find vector magnitudes and directions. For a geometric construction of the sum of two vectors in a plane, we follow the parallelogram rule. Suppose two vectors are at arbitrary positions. Translate either one of...
We use the laws of geometry to construct resultant vectors, followed by trigonometry to find vector magnitudes and directions. For a geometric construction of the sum of two vectors in a plane, we follow the parallelogram rule. Suppose two vectors are at arbitrary positions. Translate either one of...
13.6K


