在白光干涉测量中使用仪器转移函数评估二进制伪随机数组进行地形恢复
Applied optics
|August 12, 2025
概括
准确的白光干扰测量 (WLI) 地形测量需要知道仪器传递函数 (ITF). 这项研究使用二进制伪随机数组 (BPRA) 来推导ITF,以提高测量准确性和WLI性能.
科学领域:
- 表面计量学 表面计量学
- 光学仪器仪器仪表的光学仪器仪表.
- 信号处理 信号处理
背景情况:
- 精确的地形测量在各种科学和工程领域至关重要.
- 白光干涉测量 (WLI) 是一种用于表面表征的常见技术.
- 仪器传输函数 (ITF) 显著影响WLI测量准确性.
研究的目的:
- 开发一种可靠的方法来确定白光干扰计 (WLI) 的仪器传递函数 (ITF).
- 通过改进ITF表征和数据处理,提高WLI地形测量的准确性.
- 建立ITF分析的理论基准,使用二进制伪随机数组 (BPRA).
主要方法:
- 对离散样本二元伪随机数组 (BPRA) 的功率光谱密度 (PSD) 的分析表达式的推导.
- 通过将BPRA的理论PSD与其测量的PSD进行比较来确定ITF.
- 将确定的ITF (或名义调制转移函数 - MTF) 集成到富里埃域恢复过器中.
- 将过器应用于WLI地形数据,并与原子力显微镜 (AFM) 测量进行比较.
主要成果:
- 为BPRA的PSD获得了一套完整的分析表达式.
- 特定WLI系统的确定ITF与其名义调制传输函数 (MTF) 非常相匹配.
- 恢复的WLI地形数据显示,在应用ITF基过器后,与原子力显微镜 (AFM) 测量结果的一致性有所改善.
结论:
- 拟议的基于BPRA的方法为测量WLI系统的ITF提供了一个强大的和实用的方法.
- 将ITF集成到过中可以显著提高WLI表面地形测量的准确性.
- 这种方法为描述WLI性能和改进表面计量学提供了有价值的工具.
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