Applied optics
|August 12, 2025
PubMed
概括

这项研究引入了一种新的源面具优化 (SMO) 方法,使用面具预测反和相似性惩罚. 这种方法显著提高了计算光刻效率,在先进节点中将运行时间减少了30%以上.

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