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刀尖横向扫描方法用于自动测量波面功率光谱密度

Ze Zhang, Zhaoyang Jiao, Yuxin Liu

|August 12, 2025

概括

一种新的尖端扫描方法为大型光学元件提供了高效的,自动化的功率光谱密度 (PSD) 检测. 这种技术简化了测量,并通过快速在线错误评估来提高高功率激光系统的性能.

科学领域:

光学工程的光学工程.
激光系统激光系统
计量学计量学计量学

背景情况:

光学元件中的中高频错误会降低激光束质量和系统效率.
功率光谱密度 (PSD) 对于量化表面波面误差至关重要.
目前用于PSD检测的干扰计方法受到稳定性要求的限制,阻碍了在线测量.

研究的目的:

开发一种高效和自动化的方法,用于PSD检测大光圈光学元件.
为了简化计算,建立影像图PSD和波PSD之间的直接关系.
为了克服在线PSD测量的传统干扰度的局限性.

主要方法:

为了检测PSD,采用了一种新的刀刃横向扫描技术.
该方法在影像图PSD和波PSD之间建立了同等关系.
使用图像拼接和侧面阻光技术来简化测量过程.

主要成果:

拟议的方法允许高效和自动PSD检测大光圈光学.
从影子图表中直接计算PSD曲线.
实验结果显示RMS误差大约为5%.

结论:

刀尖横扫描方法为在线PSD检测提供了方便和有效的方法.
该技术支持高精度光学元件的代处理,以提高激光系统性能.
这些发现为光学制造业的快速自动化计量学铺平了道路.

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