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Updated: Sep 11, 2025

Gain-compensation Methodology for a Sinusoidal Scan of a Galvanometer Mirror in Proportional-Integral-Differential Control Using Pre-emphasis Techniques
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    PubMed
    概括

    这项研究通过使用瞳孔相调节来减少垂直测量误差,提高了光刻聚焦和平衡传感器 (FLS) 的精度. 新型光学路径调制器在多层过程中显著提高了测量精度.

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    相关概念视频

    Time and frequency -Domain Interpretation of Phase-lead Control01:24

    Time and frequency -Domain Interpretation of Phase-lead Control

    Phase-lead controllers are commonly used in various control systems to enhance response speed and stability. Adjusting the brightness on a television screen offers a practical example of phase-lead control. When contrast is enhanced, a phase-lead controller is employed. Mathematically, phase-lead control is identified when the first parameter is smaller than the second.
    The design of phase-lead control involves the strategic placement of poles and zeros to balance steady-state error and system...
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