在上海同步射线辐射设施进行光学测量和制造
Na Yang1,2, Haipeng Zhang1, Zhongliang Li1
1Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China.
The Review of scientific instruments
|August 12, 2025
概括
上海同步射线辐射设施的光学组开发了用于同步射线镜的先进计量工具和制造技术. 他们在表面错误表征和镜子制造方面取得了高精度.
科学领域:
- 光学是什么?光学是什么?光学是什么?
- 材料科学 材料科学 材料科学
- 计量学 计量学 计量学
背景情况:
- 上海同步射线辐射设施 (SSRF) 的光学组支持光学元件计量和制造.
- 在SSRF第一阶段建立的计量实验室采用先进的仪器仪表来表征表面误差.
研究的目的:
- 详细介绍SSRF光学集团的计量能力和制造进步.
- 突出新型计量工具和高精度光学元件的发展.
主要方法:
- 采用1D扫描长轨迹分析仪 (LTP),激光干扰仪,白光干扰仪和原子力显微镜.
- 开发了一种新的3D长轨道分析仪 (3D LTP),用于快速采集3D表面地形图.
- 采用先进的制造技术来制造草地撞击镜.
主要成果:
- 在高,中,低空间频率中表征表面错误.
- 在1000毫米镜头上达到<200纳德的斜率误差.
- 制造了一个400毫米镜子,高度误差<2nm (PV).
结论:
- SSRF光学集团在光学计量和制造方面拥有先进的能力.
- 计量学和镜子制造方面的突破支持同步辐射应用.
- 开发的3D LTP提供了高效的3D表面地形测量.
相关概念视频
01:30Electronic Distance Measuring Instruments
Electronic Distance Measuring Instruments (EDMs) are essential tools in modern surveying, offering precise distance measurements by emitting electromagnetic signals and calculating the time required for these signals to travel to a target and return. Two primary types of signals are used in EDMs — light waves and microwaves — each suited to specific environmental and distance requirements. Light-wave-based EDMs utilize either infrared or laser light, providing high accuracy over short distances...
01:18Leveling Equipment
As leveling involves measuring vertical distances relative to a horizontal line of sight, it requires a graduated rod, called a level rod, for vertical measurements and an instrument called a level for a horizontal sight line. A level includes a high-powered telescope with a mechanism for leveling to ensure the line of sight is horizontal when the bubble in the spirit level is centered. Leveling rods, made of wood, metal, or fiberglass, are graduated in feet or meters and commonly used in two-...