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Updated: Sep 11, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Published on: August 15, 2014

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蜂巢盘共振器陀螺仪的0.003°/h偏差不稳定性,通过模式反转组合模式偏移控制方法实现

Liangqian Chen1, Qingsong Li2, Tongqiao Miao1

  • 1National University of Defense Technology, Changsha, China.

Microsystems & nanoengineering
|August 12, 2025
PubMed
概括

研究人员开发了一种用于微电子机械系统 (MEMS) 陀螺仪的新控制方法,显著减少偏差不稳定性和热漂移. 这一进步为MEMS陀螺仪提供了前所未有的精度,使高性能设备更容易获得.

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