概括
这项研究引入了带有可变光学减弱器的芯片内光学反干扰测量系统,用于精确的位移测量. 集成系统通过控制光学反来确保稳健的运行,使微电机系统表征等应用程序成为可能.
科学领域:
- 光子学和仪器仪表技术
- 光学计量学 在光学计量学
- 微电机系统 (MEMS) 是指微电机系统.
背景情况:
- 光学反干扰计 (OFI) 仪器需要精确控制反射光,以确保其稳健运行.
- 不受控制的光学反可以降低OFI系统的性能和可靠性.
研究的目的:
- 提出和分析一个带有集成可变光学减弱器的芯片上光学反干扰测量系统.
- 为了证明OFI系统中具有显著光学反射的高精度位移测量.
主要方法:
- 为芯片上的OFI系统开发一种新的分析模型.
- 整合一个现实的可变光学减弱器设计.
- 在一系列的反参数 (2 < C < 100) 中模拟和分析位移测量精度.
主要成果:
- 拟议的系统可以对目标距离达到几厘米的高精度位移测量.
- 集成的可变光学减弱器有效控制光学反.
- 该系统在广泛的反参数范围内展示了强大的性能.
结论:
- 芯片上的OFI系统与集成的可变光学减弱器提供了一个强大的解决方案,用于精确的短距离测量.
- 这种技术适用于具有显著和变化的光学反射的应用,例如MEMS表征.
- 开发的分析模型为进一步优化OFI系统提供了基础.
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