Jove
Visualize
联系我们
JoVE
x logofacebook logolinkedin logoyoutube logo
关于 JoVE
概览领导团队博客JoVE 帮助中心
作者
出版流程编辑委员会范围与政策同行评审常见问题投稿
图书馆员
用户评价订阅访问资源图书馆顾问委员会常见问题
研究
JoVE JournalMethods CollectionsJoVE Encyclopedia of Experiments存档
教育
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab Manual教师资源中心教师网站
使用条款与条件
隐私政策
政策

相关概念视频

Super-resolution Fluorescence Microscopy01:37

Super-resolution Fluorescence Microscopy

7.6K
Super-resolution fluorescence microscopy (SRFM) provides a better resolution than conventional fluorescence microscopy by reducing the point spread function (PSF). PSF is the light intensity distribution from a point that causes it to appear blurred. Due to PSF, each fluorescing point appears bigger than its actual size, and it is the PSF interference of nearby fluorophores that causes the blurred image. Various approaches to achieving higher resolution through SRFM have recently been...
7.6K
Confocal Fluorescence Microscopy01:16

Confocal Fluorescence Microscopy

14.3K
Confocal microscopy is an advanced microscopic technique. The prime advantage of the confocal microscope over other microscopy techniques is its ability to block the out-of-focus light from the illuminated samples using pinholes. It is widely used with fluorescence optics to obtain high-resolution, sharp contrast images. Unlike optical microscopes, confocal microscopes use a focused beam of light laser to scan the entire sample surface at different z-planes. These microscopes are, therefore,...
14.3K

您也可能阅读

相关文章

通过共同作者、期刊和引用图与本文相关的文章。

排序
Same author

Region selective super-resolution imaging lithography for 3D via fabrication.

Optics express·2026
Same author

Effective intra-field overlay compensation in lithography via mask-level thermal and mechanical control.

Nanotechnology·2025
Same author

Method of high-order advanced lithography overlay correction to enhance the manufacturing performance of integrated circuits.

Nanoscale advances·2025
Same author

Impact of mask errors on imaging quality in surface plasmon lithography.

Optics express·2025
Same author

Enhancing lithographic accuracy by mitigating overlay errors via mask-induced thermal and mechanical optimization.

Nanotechnology·2025
Same author

Source and mask optimization for stability of reticle and wafer stages.

Optics express·2024

相关实验视频

Updated: Sep 11, 2025

Determination of the Excitation and Coupling Rates Between Light Emitters and Surface Plasmon Polaritons
07:39

Determination of the Excitation and Coupling Rates Between Light Emitters and Surface Plasmon Polaritons

Published on: July 21, 2018

6.9K

使用表面等离子体共振腔光刻法进行超分辨率成像.

Dinghai Rui, LiBin Zhang, Huwen Ding

    Optics express
    |August 13, 2025
    PubMed
    概括

    这项研究引入了用于超分辨率成像的表面等离子体共振腔光刻法 (SPRCL),克服了传统等离子体光刻法 (SPL) 的局限性. SPRCL实现了增强的图案均性和对比度,为先进的纳米制造提供了改进的工艺稳定性.

    科学领域:

    • 纳米光子学 纳米光子学
    • 光学石版印刷是一种光学石版印刷.
    • 材料科学 材料科学 材料科学

    背景情况:

    • 表面等离子光刻法 (SPL) 使用 evanescent 波来超越衍射极限,但在稳定成像方面面临挑战.
    • 实现高分辨率图案对于先进的微电子和光子设备制造至关重要.

    研究的目的:

    • 提出和分析一种用于超分辨率成像的新型表面等离子体共振腔光刻 (SPRCL) 技术.
    • 调查影响SPRCL性能的因素,并与传统方法进行比较.

    主要方法:

    • 导出双共振器腔中的表面等离子极子的分散关系.
    • 光学传递函数 (OTF) 分析以了解超分辨率机制.
    • 使用特定波长和面具参数进行数值模拟.

    主要成果:

    • 实现的特征尺寸低至26.4nm (∼1/17波长),超过了传统的193nm沉浸式光刻.
    • 显示的条纹分辨率低于1/11波长,具有高对比度 (>0.9) 和NILS (>1.6).
    • 确定了影响性能的关键参数 (面罩工作周期,入射角度,电阻厚度),电阻厚度允许调节分辨率.

    结论:

    更多相关视频

    Measurement of Scattering Nonlinearities from a Single Plasmonic Nanoparticle
    15:06

    Measurement of Scattering Nonlinearities from a Single Plasmonic Nanoparticle

    Published on: January 3, 2016

    12.9K
    Demonstration of a Hyperlens-integrated Microscope and Super-resolution Imaging
    10:01

    Demonstration of a Hyperlens-integrated Microscope and Super-resolution Imaging

    Published on: September 8, 2017

    7.8K

    相关实验视频

    Last Updated: Sep 11, 2025

    Determination of the Excitation and Coupling Rates Between Light Emitters and Surface Plasmon Polaritons
    07:39

    Determination of the Excitation and Coupling Rates Between Light Emitters and Surface Plasmon Polaritons

    Published on: July 21, 2018

    6.9K
    Measurement of Scattering Nonlinearities from a Single Plasmonic Nanoparticle
    15:06

    Measurement of Scattering Nonlinearities from a Single Plasmonic Nanoparticle

    Published on: January 3, 2016

    12.9K
    Demonstration of a Hyperlens-integrated Microscope and Super-resolution Imaging
    10:01

    Demonstration of a Hyperlens-integrated Microscope and Super-resolution Imaging

    Published on: September 8, 2017

    7.8K
    • SPRCL提供了一种强大的超高分辨率成像方法,具有增强的图案质量.
    • 该技术在对比度,均性和工艺稳定性方面比传统的SPL具有显著的优势.
    • 对于下一代需要超高分辨率的纳米制造,SPRCL具有前景.