基于同轴反向哈特曼原理的大尺寸平面玻璃表面形状的在线测量和校准方法
Optics express
|August 13, 2025
概括
这项研究引入了一种新的同轴反向哈特曼法,用于精确在线测量大型钢化玻璃表面. 该技术可确保工业应用的高精度和耐振性.
科学领域:
- 光学工程是指光学工程.
- 计量学 计量学 计量学
- 材料科学 材料科学 材料科学
背景情况:
- 准确的表面形状测量对于大尺寸平坦钢化玻璃至关重要.
- 现有的方法面临在线校准和振动灵敏度的挑战.
研究的目的:
- 介绍一种新的同轴反向哈特曼方法,用于在线测量和校准大尺寸平坦钢化玻璃表面.
- 提高精度,减少振动在表面计量学中的影响.
主要方法:
- 使用同轴反向哈特曼光学路径与针孔环光源和点矩阵图案.
- 使用可移动的平面标准样本进行光学轴和角度位置映射的快速校准.
- 尽量减少入射光的角度,以减少振动的影响.
主要成果:
- 证明了光轴和角度位置关系的快速校准.
- 在测量中实现了高精度和显著的抗振性能.
- 证实了该方法在线工业应用的可行性.
结论:
- 新的同轴反向哈特曼方法提供了一个准确的,耐振动的解决方案,用于在线测量大型平坦钢化玻璃.
- 这种技术增强了制造和质量控制中的计量能力.
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