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在薄膜尼酸盐造工艺中在CMOS电压水平上运行的折叠电光调制器
Optics express
|August 13, 2025
概括
研究人员使用薄膜基酸盐开发了紧的折叠电光调制器. 这些调制器实现了低半波电压 (0.9V) 和高带宽 (>40GHz),使集成光子应用的CMOS电路能够直接驱动.
科学领域:
- 光子学 是一个光子学.
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
背景情况:
- 集成电光调制器对于高密度,低功耗光子应用至关重要.
- 薄膜酸 (TFLN) 提供了优异的低压和高带宽性能.
- 实现低半波电压 (<1V) 通常需要长的设备结构,阻碍小型化.
研究的目的:
- 为CMOS兼容性开发具有低半波电压的紧折叠电光调制器.
- 为大规模部署推进薄膜酸光子集成电路制造.
- 为了在小尺寸内展示高性能调制器.
主要方法:
- 使用TFLN技术制造折叠电光调制器.
- 利用CSEM的开放式造工艺与标准化工艺设计套件组件.
- 在TE偏振中在1550nm处的设备设计和表征.
主要成果:
- 实现了0.9V的低半波电压.
- 已证明的带宽超过40 GHz.
- 在5毫米×5毫米芯片上制造的紧型调制器.
结论:
- 折叠TFLN调制器为紧,低压,高带宽的光子集成电路提供了可行的解决方案.
- 开发的技术支持使用CMOS电路直接驾驶.
- 在TFLN制造方面的进步是广泛采用的关键.
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