概括
这项研究引入了一个紧的,三度自由度 (3-DOF) 传感器,用于精确的光学测量. 它结合了几何和对焦技术,用于在光学成像和处理应用中高精度定位.
科学领域:
- 光学工程是指光学工程.
- 计量学 计量学 计量学
- 精确度测量 精确度测量 精确度测量
背景情况:
- 测量表面的准确定位在光学成像和处理中至关重要.
- 现有的多度自由度 (多DOF) 测量方法通常需要特殊的目标,并且在范围和精度上有局限性.
研究的目的:
- 提出一个紧的3-DOF测量传感器,用于小测量表面的高精度定位.
- 将多DOF几何测量与共聚焦测量相结合,以提高精度.
- 为了能够同时测量斜率,曲率和Z轴位移.
主要方法:
- 传感器利用相机上的测量表面位置和激光点位置之间的对应性进行多DOF测量.
- 同焦技术和三角光测量用于高精度,大范围的Z轴轴向测量.
- 重复使用光路径和紧的结构设计是优先考虑的.
主要成果:
- 传感器实现了角分辨率比0.02°更好,在±2.5°的距离和曲率范围内.
- Z轴分辨率在4微米范围内达到20nm,在1毫米范围内达到500nm.
- 在合测量中,角度和位移误差保持在5%以内.
结论:
- 开发的3DOF传感器为高精度光学测量提供了一个紧而通用的解决方案.
- 它有效地整合了几何和对焦测量原理,克服了传统方法的局限性.
- 实验结果验证了其在光学应用中准确的多DOF定位的能力.
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