可重新配置的静电驱动1×5旋转MOEMS开关

Optics express
|August 13, 2025
PubMed
概括

我们开发了一种新的1×5旋转微光电机械系统 (MOEMS) 开关,用于光学网络. 这种静电驱动驱动设备提供宽带能力和低功耗,非常适合数据中心.

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