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相关概念视频

Scanning Electron Microscopy01:07

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
Fundamental Principles
Accelerated...
Overview of Microscopy Techniques01:22

Overview of Microscopy Techniques

The early pioneers of microscopy opened a window into the invisible world of microorganisms. In 1830, Joseph Jackson Lister created an essentially modern light microscope. The 20th century saw the development of microscopes that leveraged nonvisible light, such as fluorescence microscopy that uses an ultraviolet light source and electron microscopy that uses short-wavelength electron beams. These advances significantly improved magnification, image resolution, and contrast. By comparison, the...

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相关实验视频

Updated: Jul 7, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
10:28

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

10.4K

通过使用近红外激光扫描装置进行MEMS检查.

Manuel J L F Rodrigues1, Inês S Garcia1, Joana D Santos1

  • 1International Iberian Nanotechnology Laboratory, Avenida Mestre José Veiga, 4715-330 Braga, Portugal.

Sensors (Basel, Switzerland)
|August 14, 2025
PubMed
概括

这项研究引入了一种新的激光扫描技术,用于非破坏性检查微电机系统 (MEMS). 该方法使用近红外光来检测结构变化而不损坏封装的微观结构.

科学领域:

  • 材料科学 材料科学 材料科学
  • 光学工程是指光学工程.
  • 微型技术 微型技术

背景情况:

  • 封装微电机系统 (MEMS) 的传统检查通常涉及破坏性测试,损害样品完整性.
  • 存在对适用于封装微结构的非破坏性评估 (NDE) 方法的需求.

研究的目的:

  • 为封装MEMS设备进行非破坏性检查提供一种新的激光扫描设置.
  • 通过初步的实验结果来验证概念.

主要方法:

  • 使用激光扫描装置测量近红外 (NIR) 频谱内传输光强度的微小变化.
  • 利用在NIR范围内的光学透明度和在材料接口上的弗雷内尔反射来产生对比度.
  • 使用标准目标来描述系统的小特征分辨率.

主要成果:

  • 演示了激光扫描设置执行MEMS设备的非破坏性检查的能力.
  • 封闭在盖中的MEMS锁具装置的实验检查成功完成.
  • 测量的对比值与理论预测进行了比较,显示出很好的一致性.

结论:

  • 开发的激光扫描技术为检查封装MEMS设备提供了一种可行的非破坏性方法.
关键词:
IR 检查工具 检查工具在MEMS MEMS中使用.纳米测量学中的纳米学.

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  • 该方法消除了对样品准备或潜在损坏的需要,从而保持结构完整性.
  • 这种方法对MEMS制造中的质量控制和故障分析具有前景.