通过使用近红外激光扫描装置进行MEMS检查
Manuel J L F Rodrigues1, Inês S Garcia1, Joana D Santos1
1International Iberian Nanotechnology Laboratory, Avenida Mestre José Veiga, 4715-330 Braga, Portugal.
Sensors (Basel, Switzerland)
|August 14, 2025
概括
这项研究引入了一种新的激光扫描技术,用于非破坏性检查微电机系统 (MEMS). 该方法使用近红外光来检测结构变化而不损坏封装的微观结构.
科学领域:
- 材料科学 材料科学 材料科学
- 光学工程是指光学工程.
- 微型技术 微型技术
背景情况:
- 封装微电机系统 (MEMS) 的传统检查通常涉及破坏性测试,损害样品完整性.
- 存在对适用于封装微结构的非破坏性评估 (NDE) 方法的需求.
研究的目的:
- 为封装MEMS设备进行非破坏性检查提供一种新的激光扫描设置.
- 通过初步的实验结果来验证概念.
主要方法:
- 使用激光扫描装置测量近红外 (NIR) 频谱内传输光强度的微小变化.
- 利用在NIR范围内的光学透明度和在材料接口上的弗雷内尔反射来产生对比度.
- 使用标准目标来描述系统的小特征分辨率.
主要成果:
- 演示了激光扫描设置执行MEMS设备的非破坏性检查的能力.
- 封闭在盖中的MEMS锁具装置的实验检查成功完成.
- 测量的对比值与理论预测进行了比较,显示出很好的一致性.
结论:
- 开发的激光扫描技术为检查封装MEMS设备提供了一种可行的非破坏性方法.
- 该方法消除了对样品准备或潜在损坏的需要,从而保持结构完整性.
- 这种方法对MEMS制造中的质量控制和故障分析具有前景.
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