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Micro-masonry for 3D Additive Micromanufacturing
Published on: August 1, 2014
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在化平台上的紧型低压酸赛道调制器,通过微传输打印通过化平台
Optics letters
|August 15, 2025
概括
研究人员开发了一种集成在化平台上的低压酸赛道调制器. 这一进步使调制器的集成密度更高,这对于可扩展的光子系统至关重要.
科学领域:
- 光子学是指光子学的使用方法.
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
背景情况:
- 薄膜酸 (TFLN) 调制器提供高性能,但往往具有很大的足迹,阻碍了集成.
- 对于带宽限制的应用和与CMOS技术集成,需要紧的低压调制器.
研究的目的:
- 在化 (SiN) 平台上异质地集成一个紧的低压酸赛道调制器.
- 为了证明密集集成的光子设备的可扩展方法.
主要方法:
- 在SiN全通赛道共振器上微转移打印X切割的TFLN赛道板.
- 调制器的调效率和Q因子的表征.
主要成果:
- 实现了250μm × 500μm的紧调制器足迹.
- 演示了1.7 pm/V的调效率 (3.5 pm/V用于双臂操作).
- 获得了285,000的Q因子,测量的3dB带宽为1.18GHz.
结论:
- 对SiN的TFLN调制器的异质集成是通往密集集成的低压振幅调制器的可行途径.
- 这种方法利用CMOS兼容性来扩展可扩展的光子系统.
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