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Updated: Sep 11, 2025

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铁电器件的分解和极化对比通过运行激光光辐射电子显微镜与AC/DC电特性系统观察到

Hirokazu Fujiwara1, Yuki Itoya2, Masaharu Kobayashi3

  • 1Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Chiba 277-8561, Japan; Material Innovation Research Center (MIRC), The University of Tokyo, Chiba 277-8561, Japan.

Ultramicroscopy
|August 15, 2025
PubMed
概括

一个新的操作激光光辐射电子显微镜 (激光PEEM) 可视化Hf0.5Zr0.5O2 (HZO) 设备中的铁电极化和导电丝在故障后,帮助铁电设备分析.

关键词:
铁电设备是铁电设备.基于激光的光电子发射显微镜 (激光PEEM)没有破坏性分析.操作的观察观察.

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Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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