,NF3/CF4,

Yi-Tao Li1, Weilin Li2, Li-Ping Zhang1

  • 1State Key Laboratory of Fluorine & Nitrogen Chemicals, National Innovation Platform (Center) for Industry-Education Integration of Energy Storage Technology, School of Chemical Engineering and Technology, Xi'an Jiaotong University Xi'an 710049 China qingyuan.yang@xjtu.edu.cn.

Chemical science
|August 18, 2025
PubMed
概括

一个基于的新型金属有机框架,CALF-20,有效地分离三化 (NF3) 和四化碳 (CF4) 气体. 这一突破为半导体制造废物排放提供了一种可持续且具有成本效益的解决方案.