Pan Peng1,2,3, Xinqin Liu1,2,3, Shuming Yang4

  • 1State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, China.

Nature communications
|August 23, 2025
PubMed
概括

半导体的异常蚀刻是由光梯度驱动的, 不仅仅是强度. 这一发现为先进材料提供了新的3D纳米制造技术.