在未测量状态下的单晶生长系统的反干扰切换控制
IEEE transactions on cybernetics
|August 25, 2025
概括
这项研究引入了对单晶生长的反干扰切换控制,通过管理未测量的状态和干扰来提高精度. 这种新方法通过控制子系统之间的切换来提高系统的准确性.
科学领域:
- 材料科学与工程
- 控制系统工程
- 化学工程
背景情况:
- 单晶生长系统是复杂的,涉及复杂的水力动力学和热传递过程.
- 这些系统经常受到未测量的状态变量和外部/内部干扰,影响增长精度.
- 现有的控制方法可能无法在现实应用中充分应对这些挑战.
研究的目的:
- 为单晶生长系统提出先进的反干扰切换控制策略.
- 提高单晶增长的精度和稳定性,尽管未测量状态和干扰.
- 开发一种控制方法,利用多个平衡点来提高系统性能.
主要方法:
- 使用几何,水力动力和传热原理建模单晶生长系统.
- 设计具有输出反和干扰观察器的防干扰切换控制器.
- 使用多个Lyapunov函数和线性矩阵不等式 (LMI) 技术进行稳定性分析.
- 使用切换控制方法将系统分为不同的平衡点周围的多个子系统.
主要成果:
- 拟议的控制器有效地处理单晶生长中的未测量状态和干扰.
- 切换控制策略明显提高了晶体生长过程的精度.
- 系统的指数稳定性和H无限性性能在数学上得到了保证.
- 使用实际系统参数的模拟验证了控制器的可行性和有效性.
结论:
- 开发的反干扰切换控制方法为精确的单晶生长提供了强大的解决方案.
- 这种方法显著减轻未测量状态和外部干扰的影响.
- 该研究证实了拟议的控制策略的实际适用性和增强性能.
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