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Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
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在二维材料的化学蒸汽沉积过程中的解码复杂性

Zhengzheng Dang1, Yide Chang1, Jixin Wu1

  • 1UM-SJTU Joint Institute, Shanghai Jiao Tong University, Shanghai 200240, China.

Physical chemistry chemical physics : PCCP
|August 26, 2025
PubMed
概括

原子模拟为控制二维材料的化学蒸气沉积 (CVD) 提供解决方案. 这篇评论详细介绍了气相反应,吸附,扩散,核和生长的计算策略,以提高膜质量和产量.

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