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波动电子显微镜的定量校正

J M Gibson¹, M M J Treacy²

¹Department of Mechanical Engineering, FAMU-FSU College of Engineering, Tallahassee, Florida, USA.

Journal of microscopy

|August 26, 2025

概括

三种实验性校正改善了波动电子显微镜 (FEM) 的定量解释. 这些解决探测器采样,射击噪声和厚度变化,精制纳米结构和材料特性分析.

科学领域:

材料科学
凝聚物质物理学
电子显微镜

背景情况:

波动电子显微镜 (FEM) 通常产生异常低的规范变异值.
传统的定量解释方法需要精细化才能进行准确的分析.

研究的目的:

为了在FEM中进行定量解释,提出三个实验性校正.
解决当前FEM分析的局限性,特别是关于探测器效应和厚度变化.

主要方法:

研究了像素探测器对纳米衍射模式统计的影响.
考虑调制转移功能 (MTF) 的调整射击噪声.
为无形 (a-Si) 提出了另一种厚度校正方法.

主要成果:

像素检测器减少高频信号,影响背景规范差异.
在优化条件下,背景减去的峰值高度受到探测器效应的影响较小.
提出了一种新的厚度校正方法,以解决传统方法的不足.

结论:

实验性纠正对于FEM准确的定量解释至关重要.
检测器采样,MTF效应和厚度变化显著影响FEM结果.
为了解厚度效应,建议对位移失干性的进一步研究.

关键词:

4D-STEM 在无形材料中距离订单扫描传输电子显微镜 (STEM) 传输电子显微镜 (TEM)

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