在米卡基板上使用HZO电介质的埋门柔性CNT FET
Haiou Li1, Jiamin Shen1, Zhihao Zhuo1
1Guangxi Key Laboratory of Precision Navigation Technology and Application, Guilin University of Electronic Technology, Guilin 541004, China.
Nanomaterials (Basel, Switzerland)
|August 27, 2025
概括
我们使用基板和Hf0.5Zr0.5O2介电器开发了灵活的碳纳米管场效应晶体管 (CNT FET). 这些设备具有出色的电性能和机械稳定性,适用于苛刻的灵活电子产品.
科学领域:
- 材料科学
- 纳米技术
- 电子工程
背景情况:
- 碳纳米管场效应晶体管 (CNT FET) 由于其高可移动性和灵活性,对灵活的电子有希望.
- 像PI和PET这样的传统柔性基板存在诸如表面粗和机械强度差等挑战,限制了CNT FET的性能.
研究的目的:
- 在基板上制造高性能,机械稳定的CNT FET.
- 在上研究Hf0.5Zr0.5O2介电的CNT FET的电特性和机械耐用性.
主要方法:
- 使用Hf0.5Zr0.5O2作为基板上的介质来制造埋门CNTFET.
- 在静态和曲应力条件下的装置性能.
主要成果:
- 实现了38.4cm/V·s的场效应移动性,93mV/dec的下值摆动,和14.2μS的透导.
- 在曲应力下表现出卓越的机械稳定性和可靠的电气性能.
结论:
- 基板为制造高性能CNTFET提供了卓越的表面平坦性和机械耐用性.
- 开发的CNT FET适用于机械要求高的灵活电子应用.
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