基于初始校准的MEMS陀螺仪的比例因子非线性复合补偿方法
1Faculty of Engineering, Anhui Sanlian University, Hefei 230601, China.
Micromachines
|August 28, 2025
概括
微电机系统 (MEMS) 陀螺仪的尺度因子非线性是一个关键的挑战. 这项研究引入了一种新的补偿方法,显著提高了尺度因子的线性性和可重复性,提高了MEMS陀螺仪的精度.
科学领域:
- * 工程
- * 传感器技术
背景情况:
- * 微电机系统 (MEMS) 陀螺仪的偏差稳定性和准确性因错误校正技术而得到改善.
- * 尺度因子的非线性仍然是高精度MEMS陀螺仪的重要限制.
- * 低估规模因子的非线性阻碍了进一步的性能提升.
研究的目的:
- * 调查闭环MEMS陀螺仪中的尺度因子非线性机制.
- * 介绍和分析尺度因子可重复性误差的概念.
- * 提出一种复合补偿方法,以提高尺度因子的线性.
主要方法:
- *分析确定尺度因子非线性与可重复性之间的约束关系.
- * 制定综合性补偿策略,包括初步校准.
- * 利用改进的可重复性来增强基于多项式的补偿.
主要成果:
- * 规模因子非线性误差从2232.039 ppm显著降低到99.085 ppm (提高了22.5倍).
- 通过提高可重复性,证明了补偿方法的有效性和准确性.
- * 验证该方法对类似的MEMS陀螺仪架构的适用性.
结论:
- * 拟议的复合补偿方法有效地解决了MEMS陀螺仪的尺度因子非线性.
- * 提高规模因子的可重复性对于准确的非线性补偿至关重要.
- * 该方法为提高高精度MEMS陀螺仪的性能提供了可行的解决方案.
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