用MEMS激活的酸波导光学交换机的设计和静态分析
Yan Xu1,2, Tsen-Hwang Andrew Lin2, Peiguang Yan1
1College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China.
Micromachines
|August 28, 2025
概括
本研究介绍了使用化 (Si3N4) 波导的微电机系统 (MEMS) 光学开关. 该设备通过移动Si3N4线来实现切换,为集成光学表现出色.
科学领域:
- 光子学和材料科学
- 集成光学和微电机系统 (MEMS)
背景情况:
- 光学开关是现代光通信系统的关键组件.
- 现有的光学交换机技术面临着大小,功耗和集成方面的挑战.
研究的目的:
- 设计和模拟使用微电机系统 (MEMS) 调节化 (Si3N4) 波导的新型光学开关.
- 实现基于具有明显条形和横形状态的定向合 (DC) 机制的光学切换功能.
主要方法:
- 使用微电机系统 (MEMS) 来启动化 (Si3N4) 线.
- 模拟设备的两个静态状态以优化定向合 (DC) 结构参数.
- 分析关键性能指标,包括插入损失,灭绝率和交叉声响.
主要成果:
- 最优化的装置尺寸为8.8 μm × 55 μm.
- 在C频段实现的插入损失范围为0.18 dB至0.47 dB.
- 证明了极好的灭绝比率 (约. 这种声音的频率很低 (约24.70dB). - - 24.60dB) 的情况.
结论:
- 拟议的基于MEMS的光学交换机具有出色的性能特性.
- 这种设备为集成光学和光学通信和数据中心等各种应用提供了显著的优势.
- 这些发现为光学交换技术的未来发展提供了宝贵的参考.
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