具有增强逆回收特性的4H-SiC LDMOS
Yanjuan Liu1, Fangfei Bai1, Junpeng Fang2
1The College of Electronic and Information Engineering, Shenyang Aerospace University, Shenyang 110136, China.
Micromachines
|August 28, 2025
概括
在源 (THD-LDMOS) 中的一种新型沟异质连接增强了4H-SiC LDMOS的逆回收. 这种碳化装置显著降低了寄生式二极管电流和电荷,提高了性能,但没有影响其它电气特性.
科学领域:
- 材料科学
- 电气工程
- 半导体物理
背景情况:
- 4H- (SiC) LDMOS设备对于功率电子非常重要.
- 在LDMOS结构中的寄生式二极管可以限制性能,特别是在反向恢复过程中.
- 优化反向回收对于高效的功率切换应用至关重要.
研究的目的:
- 提出和研究一种新的4H-SiC LDMOS结构,在源中具有沟异质连接 (THD-LDMOS).
- 为了提高4H-SiC LDMOS中的寄生体二极管的逆回收性能.
- 分析沟异质连接对装置特性的影响.
主要方法:
- 设备模拟和表征.
- 在源区域内引入P+多结构.
- 对异质连接的形成及其电气行为的分析.
- 将THD-LDMOS与传统的4H-SiC LDMOS进行比较.
主要成果:
- 沟异极连接是单极的,并与体PiN二极管并行运行.
- 在自由旋转过程中,异质连接首先导电,防止PiN二极管开启.
- 逆回收峰值电流 (55.5%) 和逆回收收费 (77.6%) 的显著降低.
- 对LDMOS设备的其他基本电气特性没有不利影响.
结论:
- THD-LDMOS结构有效地提高了反向回收性能.
- 新的沟异质连接设计为减少载体积累提供了可行的解决方案.
- 这一进步有利于高性能电源开关应用.
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