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在芯片上集成可调节的金属和变形的多模波导,用于斑点光谱仪

Dongxuan Li, Zimeng Zhang, Bijuan Chen

|August 29, 2025

概括

我们开发了一种紧的光子光谱仪, 这种新型设备可实现集成光学传感应用的高光谱分辨率.

科学领域:

光子学
光学工程
光谱学

背景情况:

集成的光谱仪对于微型光学传感至关重要.
传统设计通常面临着足迹和光谱分辨率的限制.

研究的目的:

提出并展示一种新的光子光谱仪.
在一个紧的芯片设备中实现高光谱分辨率.

主要方法:

热光调节金属与变形的多模波导的集成.
使用具有工程边缘缺陷的多模干扰仪 (MMI) 进行波乱码.
使用标准光子造工艺进行制造.

主要成果:

在100纳米的运行带宽上实现了0.85纳米的光谱分辨率.
通过可调节的金属来证明11个输入波导的选择性激发.
与传统的光学交换机阵列相比,集成的金属提供了更紧的足迹.

结论:

拟议的光子光谱仪为芯片上的光谱分析提供了一个紧而高效的替代方案.
整合可调节的金属和工程波导缺陷提高了性能.
这项工作为集成光谱设备提供了新的架构.

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