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用于CO2传感的双槽GaAs微环共振器的设计和建模
Faezeh Pakfetrat1, Mahdi Bahadoran2, Shadab Dabagh3,4
1Department of Physics, Shiraz University of Technology, Shiraz,, 31371555, Fars, Iran.
Scientific reports
|August 29, 2025
概括
一个新的眼形微环共振器 (ESMRR) 传感器提供高度灵敏的二氧化碳 (CO2) 检测. 这种新型设备的检测极限很低,对于环境和健康监测至关重要.
科学领域:
- 光子学和光学传感
- 环境监测技术
- 传感器的材料科学
背景情况:
- 二氧化碳 (CO2) 监测对于环境和人类健康至关重要.
- 现有的气体传感器往往缺乏所需的灵敏度和分辨率.
- 折射率 (RI) 传感器为敏感气体检测提供了一个有前途的途径.
研究的目的:
- 设计和数值评估一种用于气体介质检测的新型,高度灵敏的RI传感器.
- 为了提高传感性能,研究眼形微环共振器 (ESMRR) 结构.
- 评估传感器适用于精确的二氧化碳 (CO2) 监测.
主要方法:
- 双槽微环共振器结构的数值模拟和设计.
- 在Al0.5Ga0.5As基板上使用GaAs双槽核心波导.
- 应用梅森规则用于光学转移函数推导和 var-FDTD用于数值分析.
主要成果:
- 获得了137.68nm的扩展自由光谱范围 (FSR).
- 显示了 1217.39 nm/RIU 的批量灵敏度和 4.93 × 10^-6 RIU 的分辨率.
- 报告的二氧化碳灵敏度为24.4 ppm,检测极限为0.82 ppm.
结论:
- 拟议的ESMRR传感器具有高灵敏度和高分辨率的气体检测.
- 传感器的设计对于精确的二氧化碳 (CO2) 监测是有效的.
- 这项技术具有环境和健康安全应用的潜力.
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