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Hangfeng Hu1, Fu Liu1, Jie Li1

  • 1Key Laboratory for Physical Electronics and Devices of the Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, PR China.

Micron (Oxford, England : 1993)
|August 31, 2025
PubMed
概括

本研究引入了一种微分代数方法,以提高二次电子 (SE) 收集效率,在使用维恩波器的延缓场扫描电子显微镜 (SEM) 中. 该方法优化了维恩过器设置,以改善SE检测,并通过实验结果验证发现.