Alexander V Rumyantsev1, Nikolai I Borgardt1, Roman L Volkov1

  • 1National Research University of Electronic Technology - MIET, Bld. 1, Shokin Square, Zelenograd, Moscow, 124498, Russia. lemi@miee.ru.

Nanoscale
|September 1, 2025
PubMed
概括

通过使用边缘研磨工艺提高了聚焦离子束 (FIB) 的纳米制造质量. 与传统的光滑削相比,这种策略显著减少了离子在基板中的植入.