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高度缩放的AlScN铁电二极管内存的演示,存储密度>100 Mbit/mm2

Zekun Hu¹, Hyunmin Cho¹, Rajeev Kumar Rai²

¹Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States of America.

|September 2, 2025

概括

酸 (AlScN) 铁电二极管 (FeDiode) 被缩放到40nm,保持高的启/关比. 这一突破为下一代非易失性存储应用提供了AlScN FeDiode内存.

科学领域:

材料科学
固态物理
电气工程

背景情况:

化铁电材料提供了优良的极化和半导体兼容性.
铁电二极管 (FeDiode) 是先进记忆技术的关键.

研究的目的:

为了证明酸 (AlScN) 铁电二极管 (FeDiode) 存储器的面积缩放.
在金属-绝缘体-铁电-金属 (MIFM) 和金属-铁电-金属 (MFM) 架构中评估缩放的FeDiode性能.

主要方法:

制造具有不同组成的AlScN铁电层 (20纳米厚).
极管设备的面积缩小到直径为40 nm.
缩放装置的电气特征,包括启/关比,故障场和保留.

主要成果:

成功地将AlScN FeDiode内存扩展到40nm直径,启动/关闭比率>60.
在缩放器件中增强了分解与强制场的比率 (>2.6).
在MIFM设备中证明稳定的3位非挥发性多态行为和长时间保留 (>4 × 10^4秒在85°C).

结论:

基于AlScN的FeDiode内存实现了显著的面积缩放,性能得到了改善.
规模化的FeDiode技术显示出非易失性存储的巨大潜力.
该平台适合直接集成到未来电子设备的CMOS技术中.

关键词:

美国酸铁电机记忆力储存密度

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