基于平行曲的RADSI仪器的机械设计用于曲线X射线镜像计量
Lukas M Lienhard1, Corey Austin1, Weihe Xu1
1National Synchrotron Light Source II (NSLS-II), Brookhaven National Laboratory, P.O. Box 5000, Upton, New York 11973, USA.
The Review of scientific instruments
|September 3, 2025
概括
一个新的接干扰仪器为同步光学提供了精确的纳米级测量. 这种先进的计量系统克服了镜子坡的挑战,使射限度对焦的精度更高.
科学领域:
- 光学与计量学
- 材料科学
- 物理
背景情况:
- 先进的同步射线光束线需要高度精确的反射光学来实现偏光限制的聚焦.
- 传统的干涉测量方法难以应对现代光学元件的坡范围 (>15 mrad).
- 下纳米测量的可重复性对于制造下一代光学系统至关重要.
研究的目的:
- 开发一种新的计量仪器,用于精确描述具有挑战性的斜率范围的反射光学.
- 为了提高先进的同步仪应用中使用的镜子的表面形状精度.
- 实现可重复的纳米到亚纳米测量,用于光学计量.
主要方法:
- 开发一种可确定相对角度的接干扰仪器.
- 实现基于平行曲的机械设计,以提高稳定性.
- 使用具有16米弧度半径和5mrad斜率范围的圆柱形镜子进行测试.
主要成果:
- 在圆柱形镜的初始测量中证明了纳米级的重复性.
- 平行曲设计提供了更好的振动和热稳定性.
- 该仪器是紧和轻量级的,适用于各种计量应用.
结论:
- 新的接干扰测量仪器有效测量具有显著斜率范围的光学.
- 该系统显示了在进一步开发中实现亚纳米重复性的潜力.
- 这一进步支持现代同步辐射设施的更高精度光学.
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