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开发一个真空长轨迹分析仪,用于现场测量光学元件

Shang-Wei Lin¹, Chao-Chih Chiu¹, Ming-Ying Hsu¹

¹National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan.

The Review of scientific instruments

|September 4, 2025

概括

我们开发了一种真空兼容的长距离测量仪 (LTP),用于同步子中X射线光学的现场精确测量. 这种系统克服了大气限制,在超高真空环境中实现了精确的斜率误差测量.

科学领域:

光学和计量学
同步辐射科学
真空技术

背景情况:

传统的长轨造型仪 (LTP) 在现场运行,限制了超精确光学的现场测量.
之前使用外部激光通过视窗的现场方法受到光学扭曲和空气流的影响.
精确的X射线光学测量对于先进的同步仪应用至关重要.

研究的目的:

开发一个真空兼容的长轨道分析仪 (LTP),用于超精确的X射线光学的现场测量.
克服现场LTP和之前的现场光学设置的局限性.
为了实时监测和反校正同步光线中的活跃光学元件.

主要方法:

开发了一个完全真空的LTP系统,兼容超高真空 (UHV) 条件 (<1 × 10-8 Torr).
包含一个真空兼容的CMOS传感器,一个外部激光器,以及基于Takacs LTP设计的四轴电动调整阶段.
通过将测量结果与相同大气条件下的常规LTP进行比较来验证性能.

主要成果:

在真空中,LTP在相同条件下达到100 nrad RMS (平面) 和200 nrad RMS (曲线) 的基线性能.
在曲率半径和昏迷系数中确定可测量的偏差,归因于阶段摇摆和镜头偏差.
证实该系统的可行性超高真空兼容斜率计量.

结论:

在真空中开发的LTP系统是一个可行的工具,用于同步射线真空室的X射线光学在现场精确测量.
该系统具有测量低空间频率斜率误差的能力,这对于光学图像质量评估至关重要.
这项技术支持实时监控和反校正,提高同步仪器设备的活跃光学元件的性能.

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