预计用于先进纳米技术的ESD保护的超越性能和放电能力的P型埋层DTSCR
Zhengwei Zhang1, Shupeng Chen2, Hongxia Liu2
1Xidian University School of Electronic Engineering, No. 2 Taibai South Road, Electronic City Street, Xi'an, 710071, CHINA.
Nanotechnology
|September 5, 2025
概括
一个新的P型埋层二极管触发控制校正器 (PBL-DTSCR) 提供了卓越的静电放电 (ESD) 保护. 与传统设计相比,这种新型装置显著提高了放电效率,降低了超标电压,并降低了泄漏电流.
科学领域:
- 半导体设备物理
- 集成电路的设计
- 静电放电 (ESD) 的保护
背景情况:
- 传统的二极管触发控制校正器 (DTSCR) 在电静电放电 (ESD) 保护效率和超电压方面存在局限性.
- 优化触发路径和最小化寄生结构对于提高DTSCR性能至关重要.
研究的目的:
- 提出和分析一种新的P型埋层二极管触发控制整流器 (PBL-DTSCR).
- 为了证明PBL-DTSCR的电静电放电 (ESD) 保护能力的提高.
- 评估结构修改对关键性能指标的影响,如触发电压,超标电压,放电能力和泄漏电流.
主要方法:
- 新型PBL-DTSCR结构的设计和制造.
- 加入P型ESD植入物和化物阻层.
- 从PNPN到PNPN结构的寄生SCR路径的修改.
- 对PBL-DTSCR的布局进行优化.
主要成果:
- 通过PBL-DTSCR实现了超过电压的降低40.22% (从10.94V降至6.54V).
- 与传统的DTSCR相比,排放能力增加了1. 75倍 (从1. 06A到1. 86A).
- 泄漏电流减少了99.7% (从69. 47nA降至0. 1497nA).
- 获得了低触发电压 (2.11V) 和高保持电压 (2.08V).
结论:
- PBL-DTSCR提供了显著增强的静电放电 (ESD) 保护性能.
- 这种新型结构有效地提高了排放效率,并减少了关键故障参数.
- PBL-DTSCR为半导体器件提供了可靠的ESD保护解决方案,降低了泄漏和设计灵活性.
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