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虚空兼容的微米以下液体平射装置用于软X射线光谱学

Takashige Fujiwara¹, Katsumi Midorikawa¹

¹Attosecond Science Research Team, RIKEN Center for Advanced Photonics, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan.

The Review of scientific instruments

|September 8, 2025

概括

一种新的真空兼容的液体平射装置可以为软X射线光谱学创建稳定的亚微米薄膜. 这种强大的系统可实现超快的液相和表面敏感测量,操作方便.

科学领域:

物理物理学物理
化学化学化学
材料科学材料科学材料科学

背景情况:

软X射线光谱需要稳定的液体目标.
以前的方法面临着真空兼容性和喷气稳定性的挑战.

研究的目的:

开发一种新的真空兼容液体平喷装置.
为了实现先进的光谱学稳定,亚微米液体板.

主要方法:

使用可互换的PEEK,这些微型喷射器碰撞形成一个类似叶子的喷射器.
包含一个高性能液体染色学,具有停止和继续的流量控制.
采用光谱干扰测量来测量喷射厚度.

主要成果:

在~0.1 Pa. 达到稳定,亚微米液体板 (0.7-2 μm) 在~0.1 Pa.
证明可重复的喷气式飞机运行超过6小时.
确认了快速重新启动的能力,没有真空通风.

结论:

开发的装置为超快的液相光谱学提供了一个强大的平台.
开放式设计使传输和反射模式的对齐更容易.
在真空环境中为表面敏感测量提供了新的可能性.

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