为压力传感器设计一个快速而准确的校准系统,使温度变化最小化
Juntong Cui1, Shubin Zhang1, Yanfeng Jiang1
1School of Integrated Circuits, Jiangnan University, Wuxi 214122, China.
Sensors (Basel, Switzerland)
|September 13, 2025
概括
本研究介绍了微电机系统 (MEMS) 压力传感器的高效校准系统. 自动化过程显著减少了非线性和温度漂移,提高了广泛应用的传感器精度.
科学领域:
- 传感器技术 传感器技术
- 微电机系统 (MEMS) 是指微电机系统.
- 计量学 计量学 计量学
背景情况:
- 微电机系统 (MEMS) 压力传感器在现代技术中至关重要.
- 大规模生产需要个别校准,以纠正非线性和零漂移.
- 现有的校准方法可能是耗时和劳动密集的.
研究的目的:
- 开发和验证用于测试和校准基于MEMS的绝对压力传感器的系统设计.
- 为了提高MEMS压力传感器的精度和缩短校准时间.
- 为应对MEMS压力传感器中非线性和零漂移的挑战.
主要方法:
- 使用有限元法 (FEM) 模拟来分析和验证校准系统的温度控制精度.
- 为自动化和快速测试MEMS压力传感器,开发了一种定制的校准系统.
- 设计了一个校准算法,以考虑在模拟过程中发现的温度分布不均性.
主要成果:
- FEM模拟证实了温度控制系统的准确性,并确定了轻微的不均性.
- 自动校准系统在80分钟内成功校准了9个MEMS压力传感器的批量.
- 传感器线性从全尺度 (FS) 的46.5%提高到FS的1.5%.
- 温度系数 (TC) 从 -1.35 × 10-4 V·K-1 降低到 -8.8 × 10-7 V·K-1 .
结论:
- 开发的系统设计和校准系统有效地减少了MEMS压力传感器中的非线性和温度漂移.
- 自动化过程显著提高了校准效率,使其适合大规模生产.
- 改进的传感器性能验证了综合模拟和实验方法的有效性.
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