在MEMS应用的微环共振器中基于分支的动态和内部共振
Saber Azizi1, Hamed Haddad Khodaparast1, Hadi Madinei1
1Aerospace Department, Faculty of Science and Engineering, Swansea University, Swansea, UK.
概括
本研究探讨了MEMS质量传感器和开关的微环结构,利用非线性动力学和1:3内部共振来提高灵敏度和强大的性能.
科学领域:
- 非线性动力学是一种非线性动力学.
- 机械工程 机械工程
- 微电机系统 (MEMS) 是指微电机系统.
背景情况:
- 具有低阻尼比率的微环结构是敏感动态行为检测的理想选择.
- 支梁中的几何非线性影响系统动态.
研究的目的:
- 在基激发下研究微环结构的非线性动力学.
- 探索1:3内部共振激活的潜力及其对动态响应的影响.
- 分析复杂的非线性现象,用于增强的MEMS传感器和开关应用.
主要方法:
- 导出和简化非线性微分方程到一个减少顺序模型.
- 结合的非线性Duffing型方程的分析.
- 通过改变支束长度来检查自然频率.
- 频率响应曲线分析和分支分析.
主要成果:
- 可调节的频率比率,使得1:3的内共振在主共振附近.
- 由于内部共振,在模式之间证明了高效的能量传输.
- 发现了复杂的非线性现象:模态相互作用,圆柱体分叉,准周期运动和循环折叠分叉.
结论:
- 微环结构有效地利用非线性动力学,提高灵敏度和强度.
- 内部共振和观察到的分叉为MEMS设备提供了新的操作机制.
- 这些发现为下一代MEMS质量传感器和基于分叉的开关铺平了道路.
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