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一个高精度的读取回路,用于在广泛的温度范围内工作的MEMS传感器

Xin Liu^1,2, Yinyu Liu^1,2, Quanfeng Zhou^1,2

¹Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China.

The Review of scientific instruments

|September 19, 2025

概括

本研究介绍了一种用于微半球共振陀螺仪的新型横阻力放大器 (TIA). 放大器实现了高增益和精确的电流检测,这对于先进的传感器控制系统至关重要.

科学领域:

电气工程电气工程
传感器技术传感器技术
微电子学微电子学

背景情况:

准确的信号检测对于微半球共振陀螺仪控制系统至关重要.
现有的放大器在检测小电流和在温度变化中保持稳定性方面面临着挑战.

研究的目的:

为增强微传感器电流检测设计和验证一个全差传阻放大器 (TIA).
为了在广泛的温度范围内实现可调节的增益和稳定的性能.

主要方法:

开发了一个双阶段,完全差异化的TIA架构,具有可调节的反电阻.
集成了高精度带隙参考 (BGR) 与非线性项取消和多截面曲率补偿.
使用180nm双极-CMOS-DMOS技术实现了设计.

主要成果:

通过模拟,TIA展示了高增益和灵活增益调整能力.
实验结果证实,陀螺仪前端读数的电容分辨率低于1aF.
在-40°C至65°C的温度范围内,TIA可靠运行.

结论:

拟议的TIA是有效检测微传感器应用中的小电流,特别是微半球共振陀螺仪.
集成的BGR确保了稳定的参考电流,这对于读出电路的准确性至关重要.
放大器在广泛的温度范围内的性能使其适用于苛刻的环境.

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