测量非球形光学元件使用多平面相位检索与不同曲率照明相结合
Optics express
|September 23, 2025
概括
一种新的多平面相位检索方法提高了非球形光学元件的测量. 这种技术为传输光学和反射光学提供了更好的速度和精度,提供了高精度,可扩展的解决方案.
科学领域:
- 光学和光子学 在光学和光子学.
- 计量学 计量学是一门学科.
- 光学工程是指光学工程.
背景情况:
- 无球形光学元件在现代光学系统中至关重要.
- 这些元素的准确表征和质量控制需要先进的测量技术.
研究的目的:
- 介绍一个先进的测量技术为非球形光学元件.
- 改进相位检索方法中的收速度和重建精度.
主要方法:
- 一种多平面相位检索方法与可变曲率照明相结合.
- 为反射和传输元件开发特定的重建算法和更新方法.
- 用于数量测量的数字刀刃仪器的应用.
主要成果:
- 证明了更好的融合速度和重建精度.
- 使用数字刀刃仪器实现了非球形光学元件的定量测量.
- 大孔透射和反射元件的光伏偏差小于30 nm.
结论:
- 提出的方法提供了一个简单的,低成本的,高精度的测量工具为非球形光学元件.
- 该技术显示出强大的可扩展性,适用于各种应用.
- 它解决了光学制造和质量控制中先进计量学的需求.
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