允许在传统的SEM和STEM仪器中获取电子束诱导电流 (EBIC) 图像
Fernando Camino1, Byeongjun Gil2,3, Armando Rúa4
1Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, NY 11973, USA.
概括
本研究详细介绍了在扫描电子显微镜 (SEM) 和扫描传输电子显微镜 (STEM) 中实施电子束诱导电流 (EBIC) 成像. 它为分析电子材料的EBIC机制和配置提供了指导.
科学领域:
- 材料科学 材料科学 材料科学
- 物理 物理学 物理
- 电气工程 电气工程
背景情况:
- 电子束诱导电流 (EBIC) 成像是一种使用扫描电子显微镜 (SEM) 分析微电子设备的标准技术.
- 最近的进展使EBIC能够在偏差校正扫描传输电子显微镜 (STEM) 中实现,允许电子属性与原子结构和元素数据的相关性.
研究的目的:
- 介绍EBIC成像在传统的SEM和STEM系统中实施的实用方法.
- 描述锁定EBIC与快速光束遮光器的集成.
- 阐明影响EBIC成像及其依赖性的机制.
主要方法:
- 使用内在仪表电子和第三方系统实现EBIC.
- 锁定EBIC设置与快速光束遮光器的描述.
- 在不同的光束能量,样本阻抗和电气配置下,系统地研究EBIC机制.
主要成果:
- 在SEM和STEM中展示了EBIC在SEM和STEM中实施的两个不同的方法.
- 详细介绍了用于增强信号检测的锁定EBIC技术.
- 展示了实验参数对EBIC信号生成和解释的影响.
结论:
- 为研究人员提供基础知识,以便在各种电子显微镜设置中应用EBIC.
- 突出了先进的EBIC技术在现场电子材料表征方面的潜力.
- 提供了对优化EBIC实验的实用见解,以可靠地分析电荷传输特性.
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