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ETDMS:用于加速SEM图像超分辨率的高效双阶段扩散模型

Xuecheng Zhang¹, Zixin Li², Bin Zhang³

¹Institute of Superalloys Science and Technology, School of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, China; College of Control Science and Engineering, Zhejiang University, Hangzhou, 310027, China.

Ultramicroscopy

|September 23, 2025

概括

这项研究介绍了ETDMS,一种高效的两级扩散模型,用于加速扫描电子显微镜 (SEM) 图像超分辨率. 在快速扫描过程中,ETDMS提高了图像质量,这对于动态过程至关重要.

科学领域:

材料科学材料科学材料科学
显微镜的使用方法
图像处理图像处理

背景情况:

扫描电子显微镜 (SEM) 对于材料微观结构分析至关重要.
随着更快的扫描速度,SEM图像质量下降,阻碍了动态过程观察.
现有的超高分辨率方法与高速SEM成像挑战作斗争.

研究的目的:

开发一种高效的超分辨率方法,用于高速拍摄的SEM图像.
提高SEM图像的质量和细节,而不会影响获取速度.
在SEM中解决扫描速度和图像保真之间的权衡问题.

主要方法:

推出了一种名为ETDMS的新型两级扩散模型,用于加速SEM图像超分辨率.
根据SEM原则,将分离的图像无色化和超分辨率分为不同的阶段.
在第二阶段提出了一个有条件的轻量级编码器-解码器超分辨率网络,取代传统的大型U-Nets并结合加速采样.

主要成果:

与现有的超分辨率技术相比,ETDMS显著提高了SEM图像质量.
观察到增强的评估参数,主观视觉质量和精细细节生成.
该模型在加速图像生成的同时保持高保真性方面表现出有效性.

结论:

ETDMS提供了一种高质量,加速的SEM图像超分辨率的高效解决方案.
双阶段方法和轻量级网络设计提高了发电效率.
这种方法有利于捕捉快速变化的动态流程和特定的SEM应用.

关键词:

否认扩散的概率模型.有效的两阶段扩散模型.SEM图像超分辨率的超级分辨率扫描电子显微镜 (SEM) 的使用

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