一个具有±14ppb频率稳定的超稳定的MEMS共振器,通过非线性介导的漂移抑制实现了频率稳定
Yutao Xu1, Chun Wang1, Junsheng Lv2
1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, 710049, China.
Microsystems & nanoengineering
|September 24, 2025
概括
这项研究提出了一种新的方法来稳定MEMS共振器对温度变化. 非线性介导的补偿实现了±14ppb的频率稳定性,提高了精确计时应用的精度.
科学领域:
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
- 固态物理 固态物理
- 精密工程 精密工程是指精密的工程.
背景情况:
- 基于的微电子机械系统 (MEMS) 共振器是精确计时的关键,但遭受温度诱导的频率不稳定.
- 现有的烤箱控制的MEMS共振器需要设计更改,并且缺乏制造后的灵活性.
研究的目的:
- 为MEMS共振器开发一种非线性介导的新型温度补偿方案.
- 提高基于的共振器件的频率稳定性,而不会改变制造工艺.
主要方法:
- 利用了Duffing共振器的非线性振幅频率依赖.
- 实施了两阶段的补偿:最初的烤箱控制,然后通过非线性介导主动抑制频率漂移.
主要成果:
- 实现了MEMS共振器的±14ppb的频率稳定性.
- 证明了对频率稳定性进行快速和精确的控制,以应对温度变化.
结论:
- 拟议的非线性介导补偿方案有效地提高了MEMS共振器频率稳定性.
- 这种方法提供了制造后的灵活性,并扩大了共振器件的工程应用.
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