关于CO2-和H2O-增强可溶性对比度在锡氧光电阻剂中的DFT研究

Fang-Ling Yang1, Zong-Biao Ye1, Dongxu Yang2

  • 1Key Laboratory of Radiation Physics and Technology, Ministry of Education, Institute of Nuclear Science and Technology, Sichuan University, No. 24 South Section 1, Yihuan Road, Chengdu 610065, People's Republic of China.

概括

锡的子显示出有前途的光电阻. 水和二氧化碳通过触发交联反应来增强可溶性对比,改善深紫外线 (DUV) 和极紫外线 (EUV) 石版画中的光电阻性能.