单体Sr复合物与四酸胺酸联体相结合,用于含有Sr的薄膜沉积
Yongmin Go1,2, Sangmi Gu1,2, Sunyoung Shin1
1Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon 34114, Republic of Korea.
Inorganic chemistry
|September 26, 2025
概括
为了原子层沉积,合成了新的复合物. 复合物1显示出高热稳定性和挥发性,使其成为含氧化物薄膜的有希望的前体.
科学领域:
- 无机化学 无机化学
- 材料科学 材料科学 材料科学
背景情况:
- 含有的氧化物薄膜对于各种电子应用至关重要.
- 开发稳定和挥发性的前体对于有效的薄膜沉积技术,如原子层沉积 (ALD),至关重要.
研究的目的:
- 合成和描述新型的复合物作为ALD的潜在前体.
- 评估合成复合物的热稳定性,挥发性和结构性质.
主要方法:
- 使用四丹酸连接体合成复合物.
- 通过核磁共振 (NMR) 光谱学,热重力测量分析 (TGA),元素分析 (EA) 和单晶X射线晶体学 (XRC) 进行表征.
主要成果:
- 合成了三种新的复合物 (1-3),具有单核结构和双盖三角形镜几何结构.
- 综合体1表现出良好的挥发率 (70°C在0.75 Torr) 和一个计算的蒸发度 (ΔHvap) 50.3 kJ/mol.
- 综合体1在研究综合体中表现出最高的热稳定性.
结论:
- 合成的复合体在结构上有很好的定义.
- 复合物1被确定为含氧化物薄膜的原子层沉积的非常有前途的前体,由于其热稳定性和挥发性.
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