粘附层厚度对接触电阻和Schottky屏障特征的影响 WSe2 场效应晶体管

Sung-Ha Kim1,2, Seong-Yeon Lee3, Tae-Jeong Kim1,2

  • 1Department of Physics, Chungnam National University, Daejeon 34134, Republic of Korea.

PubMed
概括

更厚的 (Cr) 粘附层显著提高了多层二化 (WSe2) 场效应晶体管 (FET) 的电性能. 增加Cr厚度降低了接触阻力和Schottky屏障高度,提高了载体注入.

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