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最佳的D形工具路径设计,以尽量减少X轴伺服器在转向离轴光学表面时出现的错误
Baohua Chen1, Quanying Wu1, Yunhai Tang1
1Key Laboratory of Efficient Low-Carbon Energy Conversion and Utilization of Jiangsu Provincial Higher Education Institutions, School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, China.
Materials (Basel, Switzerland)
|September 27, 2025
概括
这项研究优化了D形工具路径以缓慢的工具伺服器 (STS) 转向,显著减少了X轴伺服器在光学镜片制造中的错误后. 改进的方法提高了离轴曲面和圆柱形阵列的精度.
科学领域:
- 光学工程是指光学工程.
- 制造业 制造技术 制造技术
- 精密工程 精密工程是指精密的工程.
背景情况:
- 慢工具伺服器 (STS) 转向对于高质量的光学镜片表面至关重要.
- 在STS转中,传统的D形工具路径会导致过度的X轴伺服继错误.
- 离轴非球形和圆柱形微镜阵列需要精确的表面加工.
研究的目的:
- 为STS转向开发一个优化的D形工具路径.
- 为了最大限度地减少 X 轴伺服器在光学表面加工过程中的错误.
- 为了提高离轴曲面和圆柱形阵列的精度.
主要方法:
- 将D形工具路径投影划分为切割和过渡区域.
- 在过渡区建立一个具有连续性约束 (表面高度,料率,加速度) 的方程系统.
- 实现XZC插值,以实现光滑的C轴旋转速度.
主要成果:
- 与传统方法相比,X轴加速减少了84%.
- 在7nm以内的错误后实现了X轴伺服器.
- 对于加工光学元件,在632.8nm时达到0.361λ的表面形状精度.
结论:
- 优化的D形工具路径使复杂光学表面的高精度加工成为可能.
- 这种方法有效地解决了STS转中的伺服继错误.
- 一个离轴球形表面和一个整体镜子的成功加工证明了该技术的可行性.
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