推推电热MEMS执行器与Si-to-Si接触,用于直流电源切换应用程序
Abdurrashid Hassan Shuaibu1, Almur A S Rabih1, Yves Blaquière1
1Department of Electrical Engineering, École de Technologie Supérieure, Université du Québec, Montréal, QC H3C 1K3, Canada.
Micromachines
|September 27, 2025
概括
本研究介绍了一种用于直流电源应用的新型-微电机系统 (MEMS) 开关. 新设计提供了低接触电阻和高故障电压,提高了电源切换的可靠性.
科学领域:
- 电气工程 电气工程
- 材料科学 材料科学 材料科学
- 机械工程 机械工程
背景情况:
- 微电机系统 (MEMS) 开关比传统开关具有紧的尺寸和高度隔离等优势.
- 现有的MEMS开关在直流电源应用中面临着可靠性和性能方面的挑战.
研究的目的:
- 介绍一款新型的到 (Si-to-Si) MEMS开关,用于直流电源切换,具有双悬浮旋执行器.
- 通过强大的设计,提高基于MEMS的直流电源开关的可靠性和性能.
主要方法:
- 使用PiezoMUMPs工艺制造Si-to-Si MEMS开关的制造.
- 制造设备的测试,以评估执行电压,功耗,接触电阻,响应时间和故障电压.
主要成果:
- 开关实现了1.1 VDC的接触关闭,具有246mW的启动功率.
- 证明了低接触电阻 (~294 ± 2 Ω) 和快速响应时间 (4 ms 开启,2.5 ms 关闭).
- 通过接触间隙承受了高达376V的故障电压.
结论:
- 新型Si-to-Si MEMS开关显示出用于高压直流电源开关应用的巨大潜力.
- 设计的坚固性和低接触电阻有助于提高可靠性.
- 进一步的增强可以在苛刻的环境中提高性能.
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