混合动力驱动MEMS微镜与脱的压电快速轴和电磁缓慢轴,用于抑制交叉通话
Haoxiang Li1,2, Jiapeng Hou1,2, Zheng Gong3
1School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China.
Micromachines
|September 27, 2025
概括
这项研究引入了微电机系统 (MEMS) 微镜的混合动力驱动方案,显著减少了机械交叉声. 这种新的设计确保了对像LiDAR这样的应用程序的无扭曲光学扫描.
科学领域:
- 光电学是指光电子产品.
- 机械工程 机械工程
- 材料科学 材料科学 材料科学
背景情况:
- 电磁微电机系统 (MEMS) 微镜通常面临机械交叉声的问题.
- 传统设计中的共享驱动线圈会导致寄生式运动,导致圆扫描和图像质量下降.
研究的目的:
- 提出并验证一套混合动力驱动方案,以抑制MEMS微镜中的机械交叉声.
- 为了实现高精度应用的无扭曲光学扫描.
主要方法:
- 设计了一种混合动力执行方案,将压电和电磁执行器结合起来.
- 快速轴由带有S形弹 (792 Hz共振) 的压电驱动器驱动.
- 缓慢轴是独立驱动的,由一个电磁执行器在准静态模式下驱动.
主要成果:
- 混合动力设计显著抑制了机械交叉声,将寄生虫慢轴偏移减少到可以忽略的水平.
- 在快速轴上以40°的光学扫描角度实现了干净的单线扫描.
- 该系统显示了40°×20°的无扭曲视野.
结论:
- 拟议的脱混合动力执行方案有效地消除了MEMS微镜中的机械交叉声.
- 这种设计为高精度扫描应用 (如LiDAR和结构光投影) 提供了简单有效的解决方案.
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